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eess.IV2024★ 16 cited
Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review
Enrique Dehaerne, Bappaditya Dey, Victor Blanco +1
In this review, automatic defect inspection algorithms that analyze Scanning Electron Microscopy (SEM) images for Semiconductor Manufacturing (SM) are identified, categorized, and…
eess.IV2022★ 33 cited
Deep Learning-Based Defect Classification and Detection in SEM Images
Bappaditya Deya, Dipam Goswamif, Sandip Haldera +3
This proposes a novel ensemble deep learning-based model to accurately classify, detect and localize different defect categories for aggressive pitches and thin resists (High NA ap…