most citedMolecular beam homoepitaxy of N-polar AlN: enabling role of Al-assisted surface cleaning

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cond-mat.mtrl-sci2022★ 1 cited

Molecular beam homoepitaxy of N-polar AlN: enabling role of Al-assisted surface cleaning

Zexuan Zhang, Yusuke Hayashi, Tetsuya Tohei +7

N-polar aluminum nitride (AlN) is an important building block for next-generation high-power RF electronics. We report successful homoepitaxial growth of N-polar AlN by molecular b…