1 citations · 1 across the 3 of their papers we have counts for
3 papers
Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics
Yorick Broens, Hans Butler, Ramidin Kamidi +2
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demand…
Exploring the use of deep learning in task-flexible ILC
Anantha Sai Hariharan Vinjarapu, Yorick Broens, Hans Butler +1
Growing demands in today's industry results in increasingly stringent performance and throughput specifications. For accurate positioning of high-precision motion systems, feedforw…
On Improved Commutation for Moving-Magnet Planar Actuators
Yorick Broens, Hans Butler, Roland Tóth
The demand for high-precision and high-throughput motion control systems has increased significantly in recent years. The use of moving-magnet planar actuators (MMPAs) is gaining p…