5 citations · 9 across the 8 of their papers we have counts for
8 papers
Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics
Yorick Broens, Hans Butler, Ramidin Kamidi +2
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demand…
Frequency Domain Auto-tuning of Structured LPV Controllers for High-Precision Motion Control
Yorick Broens, Hans Butler, Roland Tóth
Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput,…
Exploring the use of deep learning in task-flexible ILC
Anantha Sai Hariharan Vinjarapu, Yorick Broens, Hans Butler +1
Growing demands in today's industry results in increasingly stringent performance and throughput specifications. For accurate positioning of high-precision motion systems, feedforw…
On Improved Commutation for Moving-Magnet Planar Actuators
Yorick Broens, Hans Butler, Roland Tóth
The demand for high-precision and high-throughput motion control systems has increased significantly in recent years. The use of moving-magnet planar actuators (MMPAs) is gaining p…
On modal observers for beyond rigid body control in high-precision mechatronics
Yorick Broens, Hans Butler, Roland Tóth
The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from p…
LPV sequential loop closing for high-precision motion systems
Yorick Broens, Hans Butler, Roland Tóth
Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while s…
On discretization of continuous-time LPV control solutions
Yorick Broens, Hans Butler, Roland Tóth
In recent years, the Linear Parameter-Varying (LPV) framework has become increasingly useful for analysis and control of time-varying systems. Generally, LPV control synthesis is p…
Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer-accurate planar actuator system
Ioannis Proimadis, Yorick Broens, Roland Tóth +1
Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatron…