collaborators

1 paper

cs.OH2008

A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications

Renaud Robin, Salim Touati, Karim Segueni +2

This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structur…