most citedSilicon cantilevers locally heated from 300K up to the melting point: temperature profile measurement from their resonances frequency shift

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cond-mat.mtrl-sci2020★ 12 cited

Silicon cantilevers locally heated from 300K up to the melting point: temperature profile measurement from their resonances frequency shift

Basile Pottier, Felipe Aguilar, Mickaël Geitner +2

When heated, micro-resonators present a shift of their resonance frequencies. We study specifically silicon cantilevers heated locally by laser absorption, and evaluate theoretical…