AlCl${}_3$-dosed Si(100)-2$\times$1: Adsorbates, chlorinated Al chains, and incorporated Al

Matthew S. Radue, Sungha Baek, Azadeh Farzaneh +8

The adsorption of AlCl${}_3$ on Si(100) and the effect of annealing the AlCl${}_3$-dosed substrate was studied to reveal key surface processes for the development of atomic-precisi…