293 citations · 800 across the 25 of their papers we have counts for
5 papers · 2 filters
Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
D. Eremin, E. Kemaneci, M. Matsukuma +2
Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conser…
Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results
Birk Berger, Denis Eremin, Moritz Oberberg +7
In magnetized capacitively coupled radio-frequency discharges operated at low pressure the influence of the magnetic flux density on discharge properties has been studied recently…
Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode
Denis Eremin, Dennis Engel, Dennis Krüger +9
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investi…
Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code
D. Eremin, B. Berger, D. Engel +10
The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell (PIC) simulation of a typical rf-driven axisymmetric magnetron discharge wi…
Formation mechanism of the rotating spoke in partially magnetized plasmas
Liang Xu, Denis Eremin, Andrei Smolyakov +3
Rotating spokes commonly occur in partially magnetized plasmas devices. In this paper, the driving mechanism behind the formation of an m=1 rotating spoke mode in a magnetically en…