293 citations · 800 across the 25 of their papers we have counts for
26 papers
Implicit PIC Simulations of Hydrogen Plasmas with Intense Negative Ion Production
Denis Eremin
High-density plasma discharges in hydrogen operating at low pressures are of considerable interest for negative ion production used in many applications. Their weak collisionality…
Similarity Theory and Scaling Networks for Electromagnetic Wave-Driven Plasmas
Hanyang Li, Yulia Sharova, Denis Eremin +1
We demonstrate the scale-invariant behavior of electromagnetic wave-driven radio-frequency plasmas across different dimensional scales. Using two-dimensional electromagnetic partic…
Benchmark for two-dimensional large scale coherent structures in partially magnetized ExB plasmas -- Community collaboration & lessons learned
Andrew T. Powis, Eduardo Ahedo, Alejandro Álvarez Laguna +38
Low-temperature plasmas are essential to both fundamental scientific research and critical industrial applications. As in many areas of science, numerical simulations have become a…
Sheath electron heating in surface wave discharges driven at microwave frequencies
Denis Eremin, Andrew T. Powis, Igor D. Kaganovich
Using fully electromagnetic particle-in-cell/Monte Carlo simulations, the electron heating due to interaction with a moving sheath is demonstrated to dominate in surface wave-drive…
PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films
Teresa de los Arcos, Peter Awakowicz, Marc Böke +19
This feature article presents insights concerning the correlation of PECVD and PEALD thin film structures with their barrier or membrane properties. While in principle similar prec…
Rotating spokes, potential hump and modulated ionization in radio frequency magnetron discharges
Liang Xu, Haoming Sun, Denis Eremin +4
In this work, the rotating spoke mode in the radio frequency (RF) magnetron discharge, which features the potential hump and the RF-modulated ionization, is observed and analyzed b…
Plasma propulsion simulation using particles
F. Taccogna, F. Cichocki, D. Eremin +2
This perspective paper deals with an overview of particle-in-cell / Monte Carlo collision models applied to different plasma-propulsion configurations and scenarios, from electrost…
Generation of energetic electrons by surface waves in VHF CCPs
D. Eremin, E. Kemaneci, M. Matsukuma +3
Capacitively coupled plasmas (CCP) comprise one of the main tool in active use in the plasma processing industry. However, increasing the driving frequency and electrode size is li…
Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
D. Eremin, E. Kemaneci, M. Matsukuma +2
Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conser…
Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results
Birk Berger, Denis Eremin, Moritz Oberberg +7
In magnetized capacitively coupled radio-frequency discharges operated at low pressure the influence of the magnetic flux density on discharge properties has been studied recently…
Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode
Denis Eremin, Dennis Engel, Dennis Krüger +9
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investi…
Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code
D. Eremin, B. Berger, D. Engel +10
The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell (PIC) simulation of a typical rf-driven axisymmetric magnetron discharge wi…
Formation mechanism of the rotating spoke in partially magnetized plasmas
Liang Xu, Denis Eremin, Andrei Smolyakov +3
Rotating spokes commonly occur in partially magnetized plasmas devices. In this paper, the driving mechanism behind the formation of an m=1 rotating spoke mode in a magnetically en…
Direct evidence of the gradient drift instability being the origin of a rotating spoke in a crossed field plasma
Liang Xu, Denis Eremin, Ralf Peter Brinkmann
A plasma rotating spoke in a crossed field discharge is studied using 2D radial-azimuthal fully kinetic Particle-In-Cell Monte Carlo Collision (PIC/MCC) simulations. The kinetic mo…
A global model of cylindrical and coaxial surface-wave discharges
Efe Kemaneci, Felix Mitschker, Marcel Rudolph +4
A volume-averaged global model is developed to investigate surface-wave discharges inside either cylindrical or coaxial structures. The neutral and ion wall flux is self-consistent…
Electromagnetic Effects in Capacitively Coupled Plasmas
D. Eremin
Following requirements of the plasma processing industry for increasing throughput, capacitively coupled plasma reactors with large area electrodes driving by very high frequency s…
A New Hybrid Scheme for Simulations of Highly Collisional RF-Driven Plasmas
Denis Eremin, Torben Hemke, Thomas Mussenbrock
This work describes a new 1D hybrid approach for modeling atmospheric pressure discharges featuring complex chemistry. In this approach electrons are described fully kinetically us…
Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas
S. Wilczek, J. Trieschmann, D. Eremin +8
The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-te…
An algebraic RF sheath model for all excitation waveforms and amplitudes, and all levels of collisionality
A. E. Elgendy, H. Hatefinia, T. Hemke +5
The boundary sheath of a low temperature plasma comprises typically only a small fraction of its volume but is responsible for many aspects of the macroscopic behavior. A thorough…
Kinetic simulation of the sheath dynamics in the intermediate radio-frequency regime
M. Shihab, A. T. Elgendy, I. Korolov +6
The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency ar…
A phenomenological model for the description of rotating spokes in HiPIMS discharges
S Gallian, W N G Hitchon, D Eremin +2
In the ionization region above circular planar magnetrons well defined regions of high emissivity are observed, when the discharge is driven in the HiPIMS regime. Once their mode i…
Simulation benchmarks for low-pressure plasmas: capacitive discharges
M. M. Turner, A. Derzsi, Z. Donko +4
Benchmarking is generally accepted as an important element in demonstrating the correctness of computer simulations. In the modern sense, a benchmark is a computer simulation resul…
Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas
T. Hemke, D. Eremin, T. Mussenbrock +5
Electron heating and ionization dynamics in capacitively coupled radio frequency (RF) atmospheric pressure microplasmas operated in helium are investigated by Particle in Cell simu…
Simulations of electromagnetic effects in high frequency capacitively coupled discharges using the Darwin approximation
Denis Eremin, Torben Hemke, Ralf Peter Brinkmann +1
The Darwin approximation is investigated for its possible use in simulation of electromagnetic effects in large size, high frequency capacitively coupled discharges. The approximat…