293 citations · 800 across the 25 of their papers we have counts for
Showing 2015 · physics.plasm-phShow all
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physics.plasm-ph2015★ 2 cited
Electromagnetic Effects in Capacitively Coupled Plasmas
D. Eremin
Following requirements of the plasma processing industry for increasing throughput, capacitively coupled plasma reactors with large area electrodes driving by very high frequency s…
physics.plasm-ph2015★ 22 cited
A New Hybrid Scheme for Simulations of Highly Collisional RF-Driven Plasmas
Denis Eremin, Torben Hemke, Thomas Mussenbrock
This work describes a new 1D hybrid approach for modeling atmospheric pressure discharges featuring complex chemistry. In this approach electrons are described fully kinetically us…
physics.plasm-ph2015★ 87 cited
Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas
S. Wilczek, J. Trieschmann, D. Eremin +8
The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-te…