Azadeh Farzaneh

collaborators

2 papers

cond-mat.mtrl-sci2021

Area-selective deposition and B $δ$ -doping of Si(100) with BCl $_{3}$

K. J. Dwyer, S. Baek, Azadeh Farzaneh +3

B-doped $δ$ -layers were fabricated in Si(100) using BCl $_{3}$ as a dopant precursor in ultrahigh vacuum. BCl $_{3}$ adsorbed readily at room temperature, as revealed by scanning tun…

cond-mat.mtrl-sci2021

AlCl $_{3}$ -dosed Si(100)-2 $\times$ 1: Adsorbates, chlorinated Al chains, and incorporated Al

Matthew S. Radue, Sungha Baek, Azadeh Farzaneh +8

The adsorption of AlCl $_{3}$ on Si(100) and the effect of annealing the AlCl $_{3}$ -dosed substrate was studied to reveal key surface processes for the development of atomic-precisi…

Area-selective deposition and B δ-doping of Si(100) with BCl3​

AlCl3​-dosed Si(100)-2×1: Adsorbates, chlorinated Al chains, and incorporated Al

Area-selective deposition and B $δ$ -doping of Si(100) with BCl $_{3}$

AlCl $_{3}$ -dosed Si(100)-2 $\times$ 1: Adsorbates, chlorinated Al chains, and incorporated Al