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eess.SY2024★ 1 cited
Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics
Yorick Broens, Hans Butler, Ramidin Kamidi +2
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demand…
eess.SY2024
Frequency Domain Auto-tuning of Structured LPV Controllers for High-Precision Motion Control
Yorick Broens, Hans Butler, Roland Tóth
Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput,…