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cond-mat.mtrl-sci2022★ 10 cited
STEM analysis of deformation and B distribution in nanosecond laser ultra-doped Si B
G. Hallais, G. Patriarche, L. Desvignes +2
We report on the structural properties of highly B-doped silicon (> 2 at. %) realised by nanosecond laser doping. We investigate the crystalline quality, deformation and B distribu…
cond-mat.mtrl-sci2022
Evidence of boron pairs in highly boron laser doped silicon
Léonard Desvignes, Francesca Chiodi, Géraldine Hallais +5
Secondary Ions Mass Spectroscopy and Hall effect measurements were performed on boron doped silicon with concentration between 0.02 at.% and 12 at.%. Ultra-high boron doping was ma…