most citedIonized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms

9 citations · 9 across the 2 of their papers we have counts for

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physics.plasm-ph2024

Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO deposition process drifts

D Boivin, R Jean-Marie-Désirée, A Najah +2

In this work, coupled optical and electrical discharge measurements have been implemented to investigate the plasma state of a reactive HiPIMS TiO deposition process running at…

physics.plasm-ph2021★ 9 cited

Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms

Abderzak El Farsy, Dimitri Boivin, Cédric Noel +4

We investigated the transport titanium ions produced in a reactive high-power impulse magnetron sputtering (HiPIMS) device used for TiN coating deposition. Time-resolved mass spect…