most citedIonized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms

9 citations · 9 across the 1 of their papers we have counts for

collaborators

1 paper

physics.plasm-ph2021★ 9 cited

Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms

Abderzak El Farsy, Dimitri Boivin, Cédric Noel +4

We investigated the transport titanium ions produced in a reactive high-power impulse magnetron sputtering (HiPIMS) device used for TiN coating deposition. Time-resolved mass spect…