3 papers
cond-mat.mtrl-sci2026
Enhanced hydrogen response of copper-doped TiO synthesised by helium-assisted magnetron sputtering
Akash Kumar, Nirmal Kumar, David Kolenatý +4
Cu-doped TiO thin films for hydrogen sensing were synthesised by reactive DC magnetron sputtering in Ar/O/He mixtures, with the He fraction used as a control parameter for…
physics.plasm-ph2025
Deposition rate and energy to substrate in chopped and standard HiPIMS: identifying optimal pulse parameters
Mina Farahani, JiÅà Äapek, Tomáš Kozák
High-Power Impulse Magnetron Sputtering (HiPIMS) offers higher ionized flux fractions at the cost of lower deposition rates compared to conventional DCMS. A fine optimization of th…
physics.plasm-ph2024
On unipolar and bipolar HiPIMS pulse configurations to enhance energy flux to insulating surfaces
M. Farahani, T. Kozák, A. D. Pajdarová +2
High-power impulse magnetron sputtering (HiPIMS) delivers a high target power in short pulses, enhancing the ionization and energy of sputtered atoms and providing thus more possib…