most citedEfficient and compact thermo-optic phase shifter in silicon-rich silicon nitride

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physics.optics2022

Efficient thermo-optic micro-ring phase shifter made of PECVD silicon-rich amorphous silicon carbide

Li-Yang Sunny Chang, Steve Pappert, Paul K. L. Yu

In this work, the thermo-optic coefficient (TOC) of the silicon-rich amorphous silicon carbide (a-SiC) thin film deposited by plasma-enhanced chemical vapor deposition is character…