31 citations · 31 across the 2 of their papers we have counts for
2 papers
physics.optics2022
Efficient thermo-optic micro-ring phase shifter made of PECVD silicon-rich amorphous silicon carbide
Li-Yang Sunny Chang, Steve Pappert, Paul K. L. Yu
In this work, the thermo-optic coefficient (TOC) of the silicon-rich amorphous silicon carbide (a-SiC) thin film deposited by plasma-enhanced chemical vapor deposition is character…
physics.app-ph2021★ 31 cited
Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride
Hani Nejadriahi, Steve Pappert, Yeshaiahu Fainman +1
The design, fabrication, and characterization of low loss ultra-compact bends in high index (n = 3.1 at λ = 1550 nm) PECVD silicon rich silicon nitride (SRN) is demonstrated and ut…