22 citations · 48 across the 10 of their papers we have counts for
3 papers · 1 filter
Low-confinement silicon nitride waveguides manufactured via direct glass bonding
Mikhail V. Tsvetkov, Dmitry V. Obydennov, Alexandr S. Rykov +6
Reducing the fabrication cost of photonic integrated circuits while maintaining low optical losses and technological simplicity is essential for their wider implementation. In conv…
Silicon nitride on-chip C-band spontaneous emission generation based on lanthanide doped microparticles
Dmitry V. Obydennov, Ilya M. Asharchuk, Alexander M. Mumlyakov +5
The integration of active light-emitting elements into planar photonic circuits on a silicon nitride platform remains challenging due to material incompatibilities and high-tempera…
Enchanced reflectance SiN / SiO DBR mirror based on TEOS precursor fabricated by PECVD method
I. M. Asharchuk, M. V. Shibalov, A. M. Mumlyakov +6
In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH) and the silicon-organic precursor tetraethoxysilane (TE…