most citedInvestigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer

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physics.optics2021

Enchanced reflectance SiN / SiO DBR mirror based on TEOS precursor fabricated by PECVD method

I. M. Asharchuk, M. V. Shibalov, A. M. Mumlyakov +6

In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH) and the silicon-organic precursor tetraethoxysilane (TE…