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most citedReinforcement Learning for Process Control with Application in Semiconductor Manufacturing

3 citations · 4 across the 5 of their papers we have counts for

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cs.LG2023★ 1 cited

MFRL-BI: Design of a Model-free Reinforcement Learning Process Control Scheme by Using Bayesian Inference

Yanrong Li, Juan Du, Wei Jiang

Design of process control scheme is critical for quality assurance to reduce variations in manufacturing systems. Taking semiconductor manufacturing as an example, extensive litera…