2 papers
physics.optics2024
Global Alignment Reference Strategy for Laser Interference Lithography Pattern Arrays
Xiang Gao, Jingwen Li, Zijian Zhong +1
Large-area gratings play a crucial role in various engineering fields. However, traditional interference lithography is limited by the size of optical component apertures, making l…
physics.optics2024
Contact-interference Hybrid lithography: Toward Scalable Fabrication of cross-scale periodic micro structure and demonstration on infrared micro polarizer array
Tianshi Lu, Fuyuan Deng, Yufeng Wei +2
Subwavelength grating micro-polarizer arrays, as a type of focal plane division simultaneous detection method, are significantly advancing the development and practical application…