most citedShot noise limited nanomechanical detection and radiation pressure backaction from an electron beam

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cond-mat.mtrl-sci2026

Maskless Electron Beam-Induced Etching of Diamond in Air: A Secondary Electron-Driven Mechanism

Duc-Duy Tran, Cedric Mannequin, Fabrice Donatini +2

We report a direct, maskless electron beam-induced etching (EBIE) process for diamond in air, enabling high-precision patterning without lithography or plasma processing. Through a…