2 papers
physics.data-an2026
Titanic overconfidence -- dark uncertainty can sink hybrid metrology for semiconductor manufacturing
Ronald G. Dixson, Adam L. Pintar, R. Joseph. Kline +4
Hybrid metrology for semiconductor manufacturing is on a collision course with dark uncertainty. An IEEE technology roadmap for this venture has targeted a linewidth uncertainty of…
physics.app-ph2018
Particle tracking of microelectromechanical system performance and reliability
Craig R. Copeland, Craig D. McGray, Jon Geist +1
Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our…