Selective-area chemical beam epitaxy of in-plane InAs one-dimensional channels grown on InP(001), InP(111)B, and InP(110) surfaces

Joon Sue Lee, Sukgeun Choi, Mihir Pendharkar +15

We report on the selective-area chemical beam epitaxial growth of InAs in-plane, one-dimensional (1-D) channels using patterned SiO${}_2$-coated InP(001), InP(111)B, and InP(110) s…