47 citations · 75 across the 7 of their papers we have counts for
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physics.plasm-ph2014★ 10 cited
Plasma probe characteristics in low density hydrogen pulsed plasmas
D. I. Astakhov, W. J. Goedheer, C. J. Lee +6
Probe theories are only applicable in the regime where the probe's perturbation of the plasma can be neglected. However, it is not always possible to know, a priori, that a particu…
physics.plasm-ph2013★ 47 cited
Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
A Dolgov, D Lopaev, T Rachimova +6
Cleaning of contamination of optical surfaces by amorphous carbon (a-C) is highly relevant for extreme ultraviolet (EUV) lithography. We have studied the mechanisms for a-C removal…