47 citations · 75 across the 7 of their papers we have counts for
7 papers
A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluorescence
K. V. Nikolaev, V. Soltwisch, P. Hoenicke +6
Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parame…
Limits of surface analysis of thin film compounds using LEIS
Andrey A. Zameshin, Andrey E. Yakshin, Jacobus M. Sturm +2
Low Energy Ion Scattering (LEIS) was employed to study the surface composition of thin films of Ru on B, C and B4C films at different stages of growth. Effects of surface segregati…
Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates
Anuj Chopra, Muharrem Bayraktar, Maarten Nijland +3
Renewed interest has been witnessed in utilizing the piezoelectric response of (PZT) films on glass substrates for applications such as data storage and…
Plasma probe characteristics in low density hydrogen pulsed plasmas
D. I. Astakhov, W. J. Goedheer, C. J. Lee +6
Probe theories are only applicable in the regime where the probe's perturbation of the plasma can be neglected. However, it is not always possible to know, a priori, that a particu…
Extreme ultraviolet radiation induced defects in single-layer graphene
A. Gao, E. Zoethout, J. M. Sturm +2
We study extreme ultraviolet (EUV) radiation induced defects in single-layer graphene. Two mechanisms for inducing defects in graphene were separately investigated: photon induced…
Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
A Dolgov, D Lopaev, T Rachimova +6
Cleaning of contamination of optical surfaces by amorphous carbon (a-C) is highly relevant for extreme ultraviolet (EUV) lithography. We have studied the mechanisms for a-C removal…
Ellipsometry with an undetermined polarization state
Feng Liu, Chris J. Lee, Juequan Chen +4
We show that, under the right conditions, one can make highly accurate polarization-based measurements without knowing the absolute polarization state of the probing light field. I…