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cond-mat.mtrl-sci2020
Ab initio screening of metallic MAX ceramics for advanced interconnect applications
Kiroubanand Sankaran, Kristof Moors, Zsolt Tőkei +2
The potential of a wide range of layered ternary carbide and nitride MAX phases as conductors in interconnect metal lines in advanced CMOS technology nodes has been evaluated using…
cond-mat.mtrl-sci2020
Temperature-Dependent Resistivity of Alternative Metal Thin Films
Marco Siniscalchi, Davide Tierno, Kristof Moors +2
The temperature coefficients of the resistivity (TCR) of Cu, Ru, Co, Ir, and W thin films have been investigated as a function of film thickness below 10 nm. Ru, Co, and Ir show bu…