Ultrathin Stable Ohmic Contacts for High-Temperature Operation of $\beta$-Ga${}_2$O${}_3$ Devices

William A. Callahan, Edwin Supple, David Ginley +4

Beta gallium oxide ($\beta$-Ga${}_2$O${}_3$) shows significant promise in the high-temperature, high-power, and sensing electronics applications. However, long-term stable metallization la…