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physics.app-ph2026
Teaching an LLM agent to fit XRR curves with X-Ray Calc 3
Oleksiy V. Penkov, Jingjing Peng, Haoyu Fu
The structure of a periodic multilayer X-ray mirror is obtained by fitting its X-ray reflectivity (XRR) curve, and the result depends on how the operator normalizes and trims the c…
physics.app-ph2020★ 25 cited
Synthesis and structural analysis of Mo/B periodical multilayer X-ray mirrors for beyond extreme ultraviolet optics
Oleksiy V. Penkov, Igor A. Kopylets, Valeriy V. Kondratenko +1
The synthesis and structural analysis of Mo/B periodical multilayer X-ray mirrors (PMMs) for beyond extreme ultraviolet (BEUV) optics was performed. The PMMs were deposited by a co…