25 citations · 25 across the 1 of their papers we have counts for
3 papers
Teaching an LLM agent to fit XRR curves with X-Ray Calc 3
Oleksiy V. Penkov, Jingjing Peng, Haoyu Fu
The structure of a periodic multilayer X-ray mirror is obtained by fitting its X-ray reflectivity (XRR) curve, and the result depends on how the operator normalizes and trims the c…
Agent-authored deposition recipes for X-ray multilayer mirrors: schema-bound LLM control of a magnetron sputtering system with reflectivity-verified outcomes
Oleksiy V. Penkov, Haoyu Fu, Yueying Zhan +2
Periodic multilayer mirrors for X-rays require a layer period controlled to about 0.1 nm, set by deposition rates held in the laboratory's own notebook. A supervising model session…
Synthesis and structural analysis of Mo/B periodical multilayer X-ray mirrors for beyond extreme ultraviolet optics
Oleksiy V. Penkov, Igor A. Kopylets, Valeriy V. Kondratenko +1
The synthesis and structural analysis of Mo/B periodical multilayer X-ray mirrors (PMMs) for beyond extreme ultraviolet (BEUV) optics was performed. The PMMs were deposited by a co…