most citedMechanical stress dependence of the Fermi level pinning on an oxidized silicon surface

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cond-mat.mes-hall2018★ 6 cited

Mechanical stress dependence of the Fermi level pinning on an oxidized silicon surface

H. Li, L. Martinelli, F. Cadiz +4

A combination of micro-Raman spectroscopy and micro-XPS (X-ray photo-electron spectroscopy) mapping on statically deflected p-type silicon cantilevers is used to study the mechanic…