2 papers
physics.app-ph2021
Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing
Arun Bhaskar, Justine Philippe, Etienne Okada +7
With the evolution of radio frequency (RF)/microwave technology, there is a demand for circuits which are able to meet highly challenging RF frontend specifications. Silicon-on-ins…
physics.app-ph2020
Large-area femtosecond laser milling of silicon employing trench analysis
Arun Bhaskar, Justine Philippe, Flavie Braud +7
A femtosecond laser is a powerful tool for micromachining of silicon. In this work, large-area laser ablation of crystalline silicon is comprehensively studied using a laser source…