Efficient creation of shallow NV${}^{-}$ ensembles by high-angle ion implantation

Kento Sasaki, Hideyuki Watanabe, Tokuyuki Teraji +3

Negatively charged nitrogen-vacancy (NV${}^{-}$) centers located a few nanometers below the diamond surface are key quantum defects for nanoscale sensing of external spins. However, th…