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20202026
most citedConveyor-mode single-electron shuttling in Si/SiGe for a scalable quantum computing architecture

106 citations · 342 across the 15 of their papers we have counts for

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cond-mat.mes-hall2020★ 27 cited

How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation

Frank Volmer, Inga Seidler, Timo Bisswanger +4

We discuss how the emission of electrons and ions during electron-beam-induced physical vapor deposition can cause problems in micro- and nanofabrication processes. After giving a…