23 citations · 31 across the 2 of their papers we have counts for
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physics.app-ph2022★ 8 cited
Microsecond non-melt UV laser annealing for future 3D-stacked CMOS
Toshiyuki Tabata, Fabien Rozé, Louis Thuries +8
Three-dimensional (3D) CMOS technology encourages the use of UV laser annealing (UV-LA) because the shallow absorption of UV light into materials and the process timescale typicall…
physics.app-ph2020
Laser Processing For 3D Junctionless Transistor Fabrication
D. Bosch, P. Acosta Alba, S. Kerdiles +13
To take fully advantage of Junctionless transistor (JLT) low-cost and low-temperature features we investigate a 475 degC process to create onto a wafer a thin poly-Si layer on insu…