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20192026
most citedA Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks

27 citations · 38 across the 6 of their papers we have counts for

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cs.LG2019★ 27 cited

A Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks

Tobias Schlosser, Frederik Beuth, Michael Friedrich +1

Automated visual inspection in the semiconductor industry aims to detect and classify manufacturing defects utilizing modern image processing techniques. While an earliest possible…