activity
20152021
most citedProcess stabilization by peak current regulation in reactive high-power impulse magnetron sputtering of hafnium nitride

44 citations · 67 across the 3 of their papers we have counts for

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Showing 2018Show all

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cond-mat.mtrl-sci2018

Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias

Michelle Marie S. Villamayor, Julien Keraudy, Tetsuhide Shimizu +6

Low-temperature epitaxial growth of refractory transition-metal nitride thin films by means of physical vapor deposition has been a recurring theme in advanced thin-film technology…