44 citations · 67 across the 3 of their papers we have counts for
3 papers
On the electron energy distribution function in the high power impulse magnetron sputtering discharge
Martin Rudolph, A. Revel, D. Lundin +6
We apply the Ionization Region Model (IRM) and the Orsay Boltzmann equation for ELectrons coupled with Ionization and eXcited states kinetics (OBELIX) model to study the electron k…
Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias
Michelle Marie S. Villamayor, Julien Keraudy, Tetsuhide Shimizu +6
Low-temperature epitaxial growth of refractory transition-metal nitride thin films by means of physical vapor deposition has been a recurring theme in advanced thin-film technology…
Process stabilization by peak current regulation in reactive high-power impulse magnetron sputtering of hafnium nitride
T. Shimizu, M. Villamayor, D. Lundin +1
A simple and cost effective approach to stabilize the sputtering process in the transition zone during reactive high-power impulse magnetron sputtering (HiPIMS) is proposed. The me…