23 citations · 23 across the 1 of their papers we have counts for
2 papers
physics.plasm-ph2021★ 23 cited
On the electron energy distribution function in the high power impulse magnetron sputtering discharge
Martin Rudolph, A. Revel, D. Lundin +6
We apply the Ionization Region Model (IRM) and the Orsay Boltzmann equation for ELectrons coupled with Ionization and eXcited states kinetics (OBELIX) model to study the electron k…
cond-mat.mtrl-sci2018
Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias
Michelle Marie S. Villamayor, Julien Keraudy, Tetsuhide Shimizu +6
Low-temperature epitaxial growth of refractory transition-metal nitride thin films by means of physical vapor deposition has been a recurring theme in advanced thin-film technology…