10 citations · 21 across the 7 of their papers we have counts for
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physics.app-ph2023★ 1 cited
Fabrication and Characterization of AlN-based, CMOS compatible Piezo-MEMS Devices
Shubham Jadhav, Rudra Pratap
This paper details the development of high-quality, c-axis oriented AlN thin films up to 2 μm thick, using sputtering on platinum-coated SOI substrates for use in piezoelectric MEM…
physics.app-ph2023★ 10 cited
Mixed Nonlinear Response and Transition of Nonlinearity in a Piezoelectric Membrane
Nishta Arora, Priyanka Singh, Randhir Kumar +2
Nonlinearities play a critical role in the dynamics of mechanical resonators, enhancing sensitivity and enabling signal manipulation. Understanding the parameters affecting nonline…