10 citations · 21 across the 7 of their papers we have counts for
8 papers
Fabrication and Characterization of AlN-based, CMOS compatible Piezo-MEMS Devices
Shubham Jadhav, Rudra Pratap
This paper details the development of high-quality, c-axis oriented AlN thin films up to 2 μm thick, using sputtering on platinum-coated SOI substrates for use in piezoelectric MEM…
Mixed Nonlinear Response and Transition of Nonlinearity in a Piezoelectric Membrane
Nishta Arora, Priyanka Singh, Randhir Kumar +2
Nonlinearities play a critical role in the dynamics of mechanical resonators, enhancing sensitivity and enabling signal manipulation. Understanding the parameters affecting nonline…
Photoacoustic Image Quality Improvement from a Single Cell Low Frequency PMUT
Kaustav Roy, Arijit Paramanik, Souradip Paul +5
Photoacoustic image (PAI) quality improvement using a low frequency piezoelectric micromachined ultrasound transducer (PMUT) having the fundamental resonant frequency 1 MHz is bein…
Different textured PZT thin films grown on a single SiO2/Ti/Pt stack for piezo MEMS applications
Antony Jeyaseelan A, Vijayendra Shastri, Kaustav Roy +1
For the past two decades piezo MEMS technology are emerging for its low power consumption of ultrasonic sensing and actuation devices for biomedical applications. Still researchers…
An Experimental Study of the Acoustic Field of a Single-Cell Piezoelectric Micromachined Ultrasound Transducer (PMUT)
Bibhas Nayak, Harshvardhan Gupta, Kaustav Roy +3
Piezoelectric micromachined ultrasound transducers (PMUTs) have gained popularity in the past decade as acoustic transmitters and receivers. As these devices usually operate at res…
A PMUT Integrated Microfluidic System for Fluid Density Sensing
Kaustav Roy, Kritank Kalyan, Anuj Ashok +4
We demonstrate the design, fabrication and use of a dual electrode PMUT (Piezoelectric Micromachined Ultrasound Transducer) integrated with a microfluidic channel as a fluid densit…
Making Consistent Contacts to Graphene: Effect of Architecture and Growth Induced Defects
Krishna Bharadwaj B, Rudra Pratap, Srinivasan Raghavan
The effect of contact architecture, graphene defect density and metal-semiconductor work function difference on resistivity of metal-graphene contacts have been investigated. An ar…
Contribution of Acoustic Losses in the Quality Factor of a Micromechanical Resonator
Santhosh D. Vishwakarma, A. K. Pandey, J. M. Parpia +1
A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality…