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physics.app-ph2022
Different textured PZT thin films grown on a single SiO2/Ti/Pt stack for piezo MEMS applications
Antony Jeyaseelan A, Vijayendra Shastri, Kaustav Roy +1
For the past two decades piezo MEMS technology are emerging for its low power consumption of ultrasonic sensing and actuation devices for biomedical applications. Still researchers…
physics.app-ph2021
An Experimental Study of the Acoustic Field of a Single-Cell Piezoelectric Micromachined Ultrasound Transducer (PMUT)
Bibhas Nayak, Harshvardhan Gupta, Kaustav Roy +3
Piezoelectric micromachined ultrasound transducers (PMUTs) have gained popularity in the past decade as acoustic transmitters and receivers. As these devices usually operate at res…
physics.app-ph2021
A PMUT Integrated Microfluidic System for Fluid Density Sensing
Kaustav Roy, Kritank Kalyan, Anuj Ashok +4
We demonstrate the design, fabrication and use of a dual electrode PMUT (Piezoelectric Micromachined Ultrasound Transducer) integrated with a microfluidic channel as a fluid densit…