4 papers
PMUT-Powered Photoacoustic Detection: Revolutionizing Microfluidic Concentration Measurements
Kaustav Roy, Akshay Kumar, Vijayendra Shastri +6
This report introduces a novel optofluidic platform based on piezo-MEMS technology, capable of identifying subtle variations in the fluid concentration. The system utilizes piezoel…
Different textured PZT thin films grown on a single SiO2/Ti/Pt stack for piezo MEMS applications
Antony Jeyaseelan A, Vijayendra Shastri, Kaustav Roy +1
For the past two decades piezo MEMS technology are emerging for its low power consumption of ultrasonic sensing and actuation devices for biomedical applications. Still researchers…
An Experimental Study of the Acoustic Field of a Single-Cell Piezoelectric Micromachined Ultrasound Transducer (PMUT)
Bibhas Nayak, Harshvardhan Gupta, Kaustav Roy +3
Piezoelectric micromachined ultrasound transducers (PMUTs) have gained popularity in the past decade as acoustic transmitters and receivers. As these devices usually operate at res…
A PMUT Integrated Microfluidic System for Fluid Density Sensing
Kaustav Roy, Kritank Kalyan, Anuj Ashok +4
We demonstrate the design, fabrication and use of a dual electrode PMUT (Piezoelectric Micromachined Ultrasound Transducer) integrated with a microfluidic channel as a fluid densit…