Distinguishing the EH1 and S1 defects in n-type 4H-SiC by Laplace DLTS

Tihomir Knežević, Tomislav Brodar, Vladimir Radulović +3

We report on the low-energy electron and fast neutron irradiated 4H-SiC studied by deep-level transient spectroscopy (DLTS) and Laplace DLTS. Irradiations introduced two defects, E…