42 citations · 122 across the 16 of their papers we have counts for
4 papers · 1 filter
Machine learning for advancing low-temperature plasma modeling and simulation
Jan Trieschmann, Luca Vialetto, Tobias Gergs
Machine learning has had an enormous impact in many scientific disciplines. Also in the field of low-temperature plasma modeling and simulation it has attracted significant interes…
Charge-optimized many-body interaction potential for AlN revisited to explore plasma-surface interactions
Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann
Plasma-surface interactions during AlN thin film sputter deposition could be studied by means of reactive molecular dynamics (RMD) methods. This requires an interaction potential t…
A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits
Frederik Schmidt, Jan Trieschmann, Tobias Gergs +1
External electric circuits attached to radio-frequency plasma discharges are essential for the power transfer into the discharge and are, therefore, a key element for plasma operat…
Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations
Florian Krüger, Tobias Gergs, Jan Trieschmann
Thin film processing by means of sputter deposition inherently depends on the interaction of energetic particles with a target surface and the subsequent particle transport. The le…