13 citations · 13 across the 1 of their papers we have counts for
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A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits
Frederik Schmidt, Jan Trieschmann, Tobias Gergs +1
External electric circuits attached to radio-frequency plasma discharges are essential for the power transfer into the discharge and are, therefore, a key element for plasma operat…
Multi frequency matching for voltage waveform tailoring
Frederik Schmidt, Julian Schulze, Erik Johnson +5
Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribu…
Consistent simulation of capacitive radio-frequency discharges and external matching networks
Frederik Schmidt, Thomas Mussenbrock, Jan Trieschmann
External matching networks are crucial and necessary for operating capacitively coupled plasmas in order to maximize the absorbed power. Experiments show that external circuits in…