activity
20162020
most citedMulti frequency matching for voltage waveform tailoring

54 citations · 113 across the 5 of their papers we have counts for

collaborators

5 papers

cond-mat.mtrl-sci2020

Generalized Method for Charge Transfer Equilibration in Reactive Molecular Dynamics

Tobias Gergs, Frederik Schmidt, Thomas Mussenbrock +1

Variable charge models (e.g., EEM, QEq, ES+) in reactive molecular dynamics simulations often inherently impose a global charge transfer between atoms (approximating each system as…

physics.plasm-ph2019★ 13 cited

A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits

Frederik Schmidt, Jan Trieschmann, Tobias Gergs +1

External electric circuits attached to radio-frequency plasma discharges are essential for the power transfer into the discharge and are, therefore, a key element for plasma operat…

physics.plasm-ph2018★ 54 cited

Multi frequency matching for voltage waveform tailoring

Frederik Schmidt, Julian Schulze, Erik Johnson +5

Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribu…

physics.plasm-ph2018★ 40 cited

Consistent simulation of capacitive radio-frequency discharges and external matching networks

Frederik Schmidt, Thomas Mussenbrock, Jan Trieschmann

External matching networks are crucial and necessary for operating capacitively coupled plasmas in order to maximize the absorbed power. Experiments show that external circuits in…

physics.plasm-ph2016★ 6 cited

Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges

Jan Trieschmann, Frederik Schmidt, Thomas Mussenbrock

The paper provides a tutorial to the conceptual layout of a self-consistently coupled Particle-In-Cell/Test-Particle model for the kinetic simulation of sputtering transport in cap…