253 citations · 1.3k across the 18 of their papers we have counts for
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quant-ph2017★ 167 cited
Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators
Greg Calusine, Alexander Melville, Wayne Woods +12
Improving the performance of superconducting qubits and resonators generally results from a combination of materials and fabrication process improvements and design modifications t…
cond-mat.supr-con2017★ 15 cited
Developments Toward a 250-nm, Fully Planarized Fabrication Process With Ten Superconducting Layers And Self-Shunted Josephson Junctions
Sergey K. Tolpygo, Vladimir Bolkhovsky, Ravi Rastogi +5
We are developing a superconductor electronics fabrication process with up to nine planarized superconducting layers, stackable stud vias, self-shunted Nb/AlOx-Al/Nb Josephson junc…