In situ atomic force microscopy depth-corrected 3-dimensional focused ion beam based time-of-flight secondary ion mass spectroscopy: spatial resolution, surface roughness, oxidation

Lex Pillatsch, Szilvia Kalácska, Xavier Maeder +1

Atomic force microscopy (AFM) is a well-known tool for studying surface roughness and to collect depth information about features on the top atomic layer of samples. By combining s…