352 citations · 860 across the 21 of their papers we have counts for
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Using Aberrations to Improve Dose-Efficient Tilt-corrected 4D-STEM Imaging
Desheng Ma, David A Muller, Steven E Zeltmann
Tilt-corrected imaging methods in four-dimensional scanning transmission electron microscopy (4D-STEM) have recently emerged as a new class of direct ptychography methods that are…
3D Atomic-Scale Metrology of Strain Relaxation and Roughness in Gate-All-Around (GAA) Transistors via Electron Ptychography
Shake Karapetyan, Steven E. Zeltmann, Glen Wilk +3
To improve transistor density and electronic performance, next-generation semiconductor devices are adopting three-dimensional architectures and feature sizes down to the few-nm re…
Information in 4D-STEM: Where it is, and How to Use it
Desheng Ma, Guanxing Li, David A Muller +1
Contrast transfer mechanisms for electron scattering have been extensively studied in transmission electron microscopy. Here we revisit H. Rose's generalized contrast formalism fro…
PtyRAD: A High-performance and Flexible Ptychographic Reconstruction Framework with Automatic Differentiation
Chia-Hao Lee, Steven E. Zeltmann, Dasol Yoon +2
Electron ptychography has recently achieved unprecedented resolution, offering valuable insights across diverse material systems, including in three dimensions. However, high-quali…
Emittance Minimization for Aberration Correction II: Physics-informed Bayesian Optimization of an Electron Microscope
Desheng Ma, Steven E. Zeltmann, Chenyu Zhang +6
Aberration-corrected Scanning Transmission Electron Microscopy (STEM) has become an essential tool in understanding materials at the atomic scale. However, tuning the aberration co…